High Sensitivity Refractive Index Sensor Based on Trapezoidal Subwavelength Grating Slot Microring Resonator

High performance refractive index sensors are of important significance in numerous sensing applications including chemical, air and biophotonics. Among them, the ones with high sensitivity large quality factor especially critical. Here, we propose a sensor based on slotted silicon ring resonator, which inner outer rings made deformed subwavelength grating (SWG) waveguide trapezoidal dielectric blocks standard SWG rectangular ones, respectively. By optimizing geometry blocks, is improved by 3 times than traditional slot micro-ring resonator. The single microring resonator (T-SWGSMRR) reaches 823 nm/RIU, Q 2.5×10 4 limit detection 7.53×10 xmlns:xlink="http://www.w3.org/1999/xlink">−5 RIU obtained. further promoted utilizing two cascaded T-SWGSMRRs basis Vernier effect, 12151 nm/RIU. presented this work can be fabricated commercial CMOS process, indicating that it has potential prospects industrial applications.